Piezocon Gas Concentration Sensor

Apex gas mixing system.

Piezocon gas concentration sensor.

The complete solution for precision point of use gas mixing the apex gas mixing system powered by veeco s production proven piezocon gas concentration sensor allows manufacturers to reduce production costs by purchasing lower cost higher concentration gases then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. The piezocon gas concentration sensor provides increased yield and is the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in cvd and mocvd processes. It generates gas mixtures for tighter process read more. Dry film resist stripping data sheet.

Wafer scrubber data sheet. Effective post tsv drie wet clean process for tsv applications. Apex gas mixing system the apex gas mixing system reduces production costs by allowing you to purchase lower cost higher concentration. As the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in cvd and.

The apex gas mixing system powered by veeco s production proven piezocon gas concentration sensor allows manufacturers to reduce production costs by purchasing lower cost higher concentration gases then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. Piezocon gas concentration sensor. Active control of mixture concentration compensates for changes or drifts in upstream concentration. Piezocon brings critical control to cvd mocvd applications last update.

Out of a 1 percent dopant premix the piezocon precision gas mixing system can generate a 50ppm dopant gas mixture with a 0 5ppm or better concentration control tank to tank and over the shelf life of the tank. Get an improved gas mixture concentration with the precision gas mixing system. Piezocon gas concentration sensor and delivery control system data sheet. With over 2 800 installations worldwide the piezocon system.

Piezocon gas concentration sensor. Flux removal and cleaning data sheet.